Radio-Frequency Capacitive Discharges

Name: Radio-Frequency Capacitive Discharges
Author: Yuri P. Raizer

Yuri P. Raizer, Mikhail N. Shneider, Nikolai A. Yatsenko

Taylor & Francis Inc

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Describes radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. This work provides a treatment of the physics underlying rf discharges, techniques for generating such discharges, experimental methods and measurement techniques, and research results.

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